2/20/2011	10:59:44 AM	Bypass valve closed
2/20/2011	10:59:45 AM	Main Vac valve closed
2/20/2011	11:00:25 AM	Bypass valve opened
2/20/2011	11:00:25 AM	Main Vac valve opened
2/20/2011	11:01:16 AM	SiCl4 pre valve closed
2/20/2011	11:01:16 AM	SiCl4 post valve closed
2/20/2011	11:01:20 AM	Bypass valve closed
2/20/2011	11:01:22 AM	Main Vac valve closed
2/20/2011	11:01:47 AM	Bypass valve opened
2/20/2011	11:01:47 AM	Main Vac valve opened
2/20/2011	11:03:04 AM	Helium valve closed
2/20/2011	11:03:32 AM	Bypass valve closed
2/20/2011	11:03:32 AM	Main Vac valve closed
2/20/2011	11:03:41 AM	Helium valve opened
2/20/2011	11:03:42 AM	Helium valve closed
2/20/2011	11:03:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2011	11:03:45 AM	Recipe started at 11:03 AM
2/20/2011	11:03:45 AM	H2 valve closed
2/20/2011	11:03:45 AM	BCl3 valve closed
2/20/2011	11:03:45 AM	PH3 valve closed
2/20/2011	11:03:45 AM	SiCl4 pre valve closed
2/20/2011	11:03:45 AM	SiCl4 post valve closed
2/20/2011	11:03:45 AM	Main Vac valve closed
2/20/2011	11:03:45 AM	Bypass valve closed
2/20/2011	11:03:45 AM	Bubbler valve closed
2/20/2011	11:03:45 AM	Helium valve opened
2/20/2011	11:03:45 AM	Helium MFC set to  500.000000
2/20/2011	11:03:45 AM	H2 MFC set to  0.000000
2/20/2011	11:03:45 AM	BCl3 MFC set to  0.000000
2/20/2011	11:03:45 AM	PHl3 MFC set to  0.000000
2/20/2011	11:03:45 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:03:45 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:03:45 AM	Tube furnace set to 0
2/20/2011	11:04:25 AM	Run aborted at 11:04 AM
2/20/2011	11:04:25 AM	Helium valve closed
2/20/2011	11:04:25 AM	H2 valve closed
2/20/2011	11:04:25 AM	BCl3 valve closed
2/20/2011	11:04:25 AM	PH3 valve closed
2/20/2011	11:04:25 AM	SiCl4 pre valve closed
2/20/2011	11:04:25 AM	SiCl4 post valve closed
2/20/2011	11:04:25 AM	Bypass valve closed
2/20/2011	11:04:25 AM	Main Vac valve closed
2/20/2011	11:04:25 AM	Bubbler valve closed
2/20/2011	11:04:25 AM	Helium MFC set to  0.000000
2/20/2011	11:04:25 AM	H2 MFC set to  0.000000
2/20/2011	11:04:25 AM	BCl3 MFC set to  0.000000
2/20/2011	11:04:25 AM	PHl3 MFC set to  0.000000
2/20/2011	11:04:25 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:04:25 AM	Tube furnace set to 0
2/20/2011	11:04:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2011	11:14:39 AM	Helium MFC set to  500.000000
2/20/2011	11:14:40 AM	Helium valve opened
2/20/2011	11:15:24 AM	Bypass valve opened
2/20/2011	11:15:24 AM	Bypass valve closed
2/20/2011	11:15:37 AM	Helium valve closed
2/20/2011	11:16:00 AM	SiCl4 post valve opened
2/20/2011	11:16:10 AM	SiCl4 MFC set to  100.000000
2/20/2011	11:16:11 AM	SiCl4 pre valve opened
2/20/2011	11:16:18 AM	Helium valve opened
2/20/2011	11:16:57 AM	SiCl4 pre valve closed
2/20/2011	11:17:01 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:17:09 AM	Helium valve closed
2/20/2011	11:18:01 AM	SiCl4 post valve closed
2/20/2011	11:18:08 AM	Helium valve opened
2/20/2011	11:18:40 AM	Helium valve closed
2/20/2011	11:18:41 AM	SiCl4 post valve opened
2/20/2011	11:19:04 AM	Helium valve opened
2/20/2011	11:19:06 AM	SiCl4 post valve closed
2/20/2011	11:19:06 AM	SiCl4 post valve opened
2/20/2011	11:19:07 AM	SiCl4 post valve closed
2/20/2011	11:19:21 AM	SiCl4 post valve opened
2/20/2011	11:19:25 AM	SiCl4 post valve closed
2/20/2011	11:19:31 AM	SiCl4 post valve opened
2/20/2011	11:19:36 AM	SiCl4 post valve closed
2/20/2011	11:19:36 AM	Helium valve closed
2/20/2011	11:19:57 AM	SiCl4 post valve opened
2/20/2011	11:19:58 AM	SiCl4 post valve closed
2/20/2011	11:19:59 AM	SiCl4 post valve opened
2/20/2011	11:20:00 AM	SiCl4 post valve closed
2/20/2011	11:21:18 AM	SiCl4 post valve opened
2/20/2011	11:21:18 AM	SiCl4 post valve closed
2/20/2011	11:34:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:34:15 AM	Recipe started at 11:34 AM
2/20/2011	11:34:15 AM	Helium valve closed
2/20/2011	11:34:15 AM	H2 valve closed
2/20/2011	11:34:15 AM	BCl3 valve closed
2/20/2011	11:34:15 AM	PH3 valve closed
2/20/2011	11:34:15 AM	SiCl4 pre valve closed
2/20/2011	11:34:15 AM	SiCl4 post valve closed
2/20/2011	11:34:15 AM	Main Vac valve closed
2/20/2011	11:34:15 AM	Bubbler valve closed
2/20/2011	11:34:15 AM	Bypass valve opened
2/20/2011	11:34:15 AM	Helium MFC set to  0.000000
2/20/2011	11:34:15 AM	H2 MFC set to  0.000000
2/20/2011	11:34:15 AM	BCl3 MFC set to  0.000000
2/20/2011	11:34:15 AM	PHl3 MFC set to  0.000000
2/20/2011	11:34:15 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:34:15 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:34:15 AM	Tube furnace set to 0
2/20/2011	11:34:22 AM	Run aborted at 11:34 AM
2/20/2011	11:34:22 AM	Helium valve closed
2/20/2011	11:34:22 AM	H2 valve closed
2/20/2011	11:34:22 AM	BCl3 valve closed
2/20/2011	11:34:22 AM	PH3 valve closed
2/20/2011	11:34:22 AM	SiCl4 pre valve closed
2/20/2011	11:34:22 AM	SiCl4 post valve closed
2/20/2011	11:34:22 AM	Bypass valve closed
2/20/2011	11:34:22 AM	Main Vac valve closed
2/20/2011	11:34:22 AM	Bubbler valve closed
2/20/2011	11:34:22 AM	Helium MFC set to  0.000000
2/20/2011	11:34:22 AM	H2 MFC set to  0.000000
2/20/2011	11:34:22 AM	BCl3 MFC set to  0.000000
2/20/2011	11:34:22 AM	PHl3 MFC set to  0.000000
2/20/2011	11:34:22 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:34:22 AM	Tube furnace set to 0
2/20/2011	11:34:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:34:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:34:27 AM	Recipe started at 11:34 AM
2/20/2011	11:34:27 AM	Helium valve closed
2/20/2011	11:34:27 AM	H2 valve closed
2/20/2011	11:34:27 AM	BCl3 valve closed
2/20/2011	11:34:27 AM	PH3 valve closed
2/20/2011	11:34:27 AM	SiCl4 pre valve closed
2/20/2011	11:34:27 AM	SiCl4 post valve closed
2/20/2011	11:34:27 AM	Main Vac valve closed
2/20/2011	11:34:27 AM	Bubbler valve closed
2/20/2011	11:34:27 AM	Bypass valve opened
2/20/2011	11:34:27 AM	Helium MFC set to  0.000000
2/20/2011	11:34:27 AM	H2 MFC set to  0.000000
2/20/2011	11:34:27 AM	BCl3 MFC set to  0.000000
2/20/2011	11:34:27 AM	PHl3 MFC set to  0.000000
2/20/2011	11:34:27 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:34:27 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:34:27 AM	Tube furnace set to 0
2/20/2011	11:34:51 AM	Helium valve closed
2/20/2011	11:34:51 AM	H2 valve closed
2/20/2011	11:34:51 AM	BCl3 valve closed
2/20/2011	11:34:51 AM	PH3 valve closed
2/20/2011	11:34:51 AM	SiCl4 pre valve closed
2/20/2011	11:34:51 AM	SiCl4 post valve closed
2/20/2011	11:34:51 AM	Bubbler valve closed
2/20/2011	11:34:51 AM	Main Vac valve opened
2/20/2011	11:34:51 AM	Bypass valve opened
2/20/2011	11:34:51 AM	Helium MFC set to  0.000000
2/20/2011	11:34:51 AM	H2 MFC set to  0.000000
2/20/2011	11:34:51 AM	BCl3 MFC set to  0.000000
2/20/2011	11:34:51 AM	PHl3 MFC set to  0.000000
2/20/2011	11:34:51 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:34:51 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:34:51 AM	Tube furnace set to 0
2/20/2011	11:34:51 AM	Run finished at 11:34 AM
2/20/2011	11:34:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:36:54 AM	Program exited cleanly
2/20/2011	11:39:10 AM	Program started normally
2/20/2011	11:39:11 AM	Helium valve closed
2/20/2011	11:39:11 AM	H2 valve closed
2/20/2011	11:39:11 AM	BCl3 valve closed
2/20/2011	11:39:11 AM	PH3 valve closed
2/20/2011	11:39:11 AM	SiCl4 pre valve closed
2/20/2011	11:39:11 AM	SiCl4 post valve closed
2/20/2011	11:39:11 AM	Main Vac valve closed
2/20/2011	11:39:11 AM	Bypass valve closed
2/20/2011	11:39:11 AM	Bubbler valve closed
2/20/2011	11:39:11 AM	Helium MFC set to  0.000000
2/20/2011	11:39:11 AM	H2 MFC set to  0.000000
2/20/2011	11:39:11 AM	BCl3 MFC set to  0.000000
2/20/2011	11:39:11 AM	PHl3 MFC set to  0.000000
2/20/2011	11:39:11 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:39:11 AM	Bypass solenoid MFC set to  760.000000
2/20/2011	11:39:11 AM	Tube furnace set to 0
2/20/2011	11:39:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:39:15 AM	Recipe started at 11:39 AM
2/20/2011	11:39:16 AM	Helium valve closed
2/20/2011	11:39:16 AM	H2 valve closed
2/20/2011	11:39:16 AM	BCl3 valve closed
2/20/2011	11:39:16 AM	PH3 valve closed
2/20/2011	11:39:16 AM	SiCl4 pre valve closed
2/20/2011	11:39:16 AM	SiCl4 post valve closed
2/20/2011	11:39:16 AM	Main Vac valve closed
2/20/2011	11:39:16 AM	Bubbler valve closed
2/20/2011	11:39:16 AM	Bypass valve opened
2/20/2011	11:39:16 AM	Helium MFC set to  0.000000
2/20/2011	11:39:16 AM	H2 MFC set to  0.000000
2/20/2011	11:39:16 AM	BCl3 MFC set to  0.000000
2/20/2011	11:39:16 AM	PHl3 MFC set to  0.000000
2/20/2011	11:39:16 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:39:16 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:39:16 AM	Tube furnace set to 0
2/20/2011	11:39:16 AM	Helium valve closed
2/20/2011	11:39:16 AM	H2 valve closed
2/20/2011	11:39:16 AM	BCl3 valve closed
2/20/2011	11:39:16 AM	PH3 valve closed
2/20/2011	11:39:16 AM	SiCl4 pre valve closed
2/20/2011	11:39:16 AM	SiCl4 post valve closed
2/20/2011	11:39:16 AM	Bubbler valve closed
2/20/2011	11:39:16 AM	Main Vac valve opened
2/20/2011	11:39:16 AM	Bypass valve opened
2/20/2011	11:39:16 AM	Helium MFC set to  0.000000
2/20/2011	11:39:16 AM	H2 MFC set to  0.000000
2/20/2011	11:39:16 AM	BCl3 MFC set to  0.000000
2/20/2011	11:39:16 AM	PHl3 MFC set to  0.000000
2/20/2011	11:39:16 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:39:16 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:39:16 AM	Tube furnace set to 0
2/20/2011	11:39:17 AM	Run finished at 11:39 AM
2/20/2011	11:39:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:39:27 AM	Bypass valve closed
2/20/2011	11:39:28 AM	Main Vac valve closed
2/20/2011	11:39:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2011	11:39:39 AM	Recipe started at 11:39 AM
2/20/2011	11:39:39 AM	H2 valve closed
2/20/2011	11:39:39 AM	BCl3 valve closed
2/20/2011	11:39:39 AM	PH3 valve closed
2/20/2011	11:39:39 AM	SiCl4 pre valve closed
2/20/2011	11:39:39 AM	SiCl4 post valve closed
2/20/2011	11:39:39 AM	Main Vac valve closed
2/20/2011	11:39:39 AM	Bypass valve closed
2/20/2011	11:39:39 AM	Bubbler valve closed
2/20/2011	11:39:39 AM	Helium valve opened
2/20/2011	11:39:39 AM	Helium MFC set to  500.000000
2/20/2011	11:39:39 AM	H2 MFC set to  0.000000
2/20/2011	11:39:39 AM	BCl3 MFC set to  0.000000
2/20/2011	11:39:39 AM	PHl3 MFC set to  0.000000
2/20/2011	11:39:39 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:39:39 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:39:39 AM	Tube furnace set to 0
2/20/2011	11:40:59 AM	Helium valve closed
2/20/2011	11:40:59 AM	H2 valve closed
2/20/2011	11:40:59 AM	BCl3 valve closed
2/20/2011	11:40:59 AM	PH3 valve closed
2/20/2011	11:40:59 AM	SiCl4 pre valve closed
2/20/2011	11:40:59 AM	SiCl4 post valve closed
2/20/2011	11:40:59 AM	Main Vac valve closed
2/20/2011	11:40:59 AM	Bypass valve closed
2/20/2011	11:40:59 AM	Bubbler valve closed
2/20/2011	11:40:59 AM	Helium MFC set to  0.000000
2/20/2011	11:40:59 AM	H2 MFC set to  0.000000
2/20/2011	11:40:59 AM	BCl3 MFC set to  0.000000
2/20/2011	11:40:59 AM	PHl3 MFC set to  0.000000
2/20/2011	11:40:59 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:40:59 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:40:59 AM	Tube furnace set to 0
2/20/2011	11:41:00 AM	Run finished at 11:41 AM
2/20/2011	11:41:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2011	11:43:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:43:11 AM	Recipe started at 11:43 AM
2/20/2011	11:43:11 AM	Helium valve closed
2/20/2011	11:43:11 AM	H2 valve closed
2/20/2011	11:43:11 AM	BCl3 valve closed
2/20/2011	11:43:11 AM	PH3 valve closed
2/20/2011	11:43:11 AM	SiCl4 pre valve closed
2/20/2011	11:43:11 AM	SiCl4 post valve closed
2/20/2011	11:43:11 AM	Main Vac valve closed
2/20/2011	11:43:11 AM	Bubbler valve closed
2/20/2011	11:43:11 AM	Bypass valve opened
2/20/2011	11:43:11 AM	Helium MFC set to  0.000000
2/20/2011	11:43:11 AM	H2 MFC set to  0.000000
2/20/2011	11:43:11 AM	BCl3 MFC set to  0.000000
2/20/2011	11:43:11 AM	PHl3 MFC set to  0.000000
2/20/2011	11:43:11 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:43:11 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:43:11 AM	Tube furnace set to 0
2/20/2011	11:43:42 AM	Helium valve closed
2/20/2011	11:43:42 AM	H2 valve closed
2/20/2011	11:43:42 AM	BCl3 valve closed
2/20/2011	11:43:42 AM	PH3 valve closed
2/20/2011	11:43:42 AM	SiCl4 pre valve closed
2/20/2011	11:43:42 AM	SiCl4 post valve closed
2/20/2011	11:43:42 AM	Bubbler valve closed
2/20/2011	11:43:42 AM	Main Vac valve opened
2/20/2011	11:43:42 AM	Bypass valve opened
2/20/2011	11:43:42 AM	Helium MFC set to  0.000000
2/20/2011	11:43:42 AM	H2 MFC set to  0.000000
2/20/2011	11:43:42 AM	BCl3 MFC set to  0.000000
2/20/2011	11:43:42 AM	PHl3 MFC set to  0.000000
2/20/2011	11:43:42 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:43:42 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:43:42 AM	Tube furnace set to 0
2/20/2011	11:43:42 AM	Run finished at 11:43 AM
2/20/2011	11:43:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:57:51 AM	Bypass valve closed
2/20/2011	11:57:52 AM	Main Vac valve closed
2/20/2011	11:58:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2011	11:58:05 AM	Recipe started at 11:58 AM
2/20/2011	11:58:05 AM	H2 valve closed
2/20/2011	11:58:05 AM	BCl3 valve closed
2/20/2011	11:58:05 AM	PH3 valve closed
2/20/2011	11:58:05 AM	SiCl4 pre valve closed
2/20/2011	11:58:05 AM	SiCl4 post valve closed
2/20/2011	11:58:05 AM	Main Vac valve closed
2/20/2011	11:58:05 AM	Bypass valve closed
2/20/2011	11:58:05 AM	Bubbler valve closed
2/20/2011	11:58:05 AM	Helium valve opened
2/20/2011	11:58:05 AM	Helium MFC set to  500.000000
2/20/2011	11:58:05 AM	H2 MFC set to  0.000000
2/20/2011	11:58:05 AM	BCl3 MFC set to  0.000000
2/20/2011	11:58:05 AM	PHl3 MFC set to  0.000000
2/20/2011	11:58:05 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:58:05 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:58:05 AM	Tube furnace set to 0
2/20/2011	11:59:25 AM	Helium valve closed
2/20/2011	11:59:25 AM	H2 valve closed
2/20/2011	11:59:25 AM	BCl3 valve closed
2/20/2011	11:59:25 AM	PH3 valve closed
2/20/2011	11:59:25 AM	SiCl4 pre valve closed
2/20/2011	11:59:25 AM	SiCl4 post valve closed
2/20/2011	11:59:25 AM	Main Vac valve closed
2/20/2011	11:59:25 AM	Bypass valve closed
2/20/2011	11:59:25 AM	Bubbler valve closed
2/20/2011	11:59:25 AM	Helium MFC set to  0.000000
2/20/2011	11:59:25 AM	H2 MFC set to  0.000000
2/20/2011	11:59:25 AM	BCl3 MFC set to  0.000000
2/20/2011	11:59:25 AM	PHl3 MFC set to  0.000000
2/20/2011	11:59:25 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:59:25 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:59:25 AM	Tube furnace set to 0
2/20/2011	11:59:26 AM	Run finished at 11:59 AM
2/20/2011	11:59:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2011	11:59:31 AM	Helium MFC set to  500.000000
2/20/2011	11:59:36 AM	Helium MFC set to  0.000000
2/20/2011	11:59:40 AM	SiCl4 post valve opened
2/20/2011	11:59:40 AM	SiCl4 post valve closed
2/20/2011	11:59:41 AM	SiCl4 post valve opened
2/20/2011	11:59:41 AM	SiCl4 post valve closed
2/20/2011	11:59:43 AM	SiCl4 post valve opened
2/20/2011	11:59:44 AM	SiCl4 post valve closed
2/20/2011	11:59:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	11:59:59 AM	Recipe started at 11:59 AM
2/20/2011	11:59:59 AM	Helium valve closed
2/20/2011	11:59:59 AM	H2 valve closed
2/20/2011	11:59:59 AM	BCl3 valve closed
2/20/2011	11:59:59 AM	PH3 valve closed
2/20/2011	11:59:59 AM	SiCl4 pre valve closed
2/20/2011	11:59:59 AM	SiCl4 post valve closed
2/20/2011	11:59:59 AM	Main Vac valve closed
2/20/2011	11:59:59 AM	Bubbler valve closed
2/20/2011	11:59:59 AM	Bypass valve opened
2/20/2011	11:59:59 AM	Helium MFC set to  0.000000
2/20/2011	11:59:59 AM	H2 MFC set to  0.000000
2/20/2011	11:59:59 AM	BCl3 MFC set to  0.000000
2/20/2011	11:59:59 AM	PHl3 MFC set to  0.000000
2/20/2011	11:59:59 AM	SiCl4 MFC set to  0.000000
2/20/2011	11:59:59 AM	Bypass solenoid MFC set to  0.000000
2/20/2011	11:59:59 AM	Tube furnace set to 0
2/20/2011	12:00:22 PM	Helium valve closed
2/20/2011	12:00:22 PM	H2 valve closed
2/20/2011	12:00:22 PM	BCl3 valve closed
2/20/2011	12:00:22 PM	PH3 valve closed
2/20/2011	12:00:22 PM	SiCl4 pre valve closed
2/20/2011	12:00:22 PM	SiCl4 post valve closed
2/20/2011	12:00:22 PM	Bubbler valve closed
2/20/2011	12:00:22 PM	Main Vac valve opened
2/20/2011	12:00:22 PM	Bypass valve opened
2/20/2011	12:00:22 PM	Helium MFC set to  0.000000
2/20/2011	12:00:22 PM	H2 MFC set to  0.000000
2/20/2011	12:00:22 PM	BCl3 MFC set to  0.000000
2/20/2011	12:00:22 PM	PHl3 MFC set to  0.000000
2/20/2011	12:00:22 PM	SiCl4 MFC set to  0.000000
2/20/2011	12:00:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	12:00:22 PM	Tube furnace set to 0
2/20/2011	12:00:22 PM	Run finished at 12:00 PM
2/20/2011	12:00:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	3:10:33 PM	Bypass valve closed
2/20/2011	3:10:34 PM	Main Vac valve closed
2/20/2011	3:10:50 PM	Bypass valve opened
2/20/2011	3:10:50 PM	Main Vac valve opened
2/20/2011	3:14:50 PM	Recipe started at 3:14 PM
2/20/2011	3:14:50 PM	Helium valve closed
2/20/2011	3:14:50 PM	BCl3 valve closed
2/20/2011	3:14:50 PM	PH3 valve closed
2/20/2011	3:14:50 PM	SiCl4 pre valve closed
2/20/2011	3:14:50 PM	SiCl4 post valve closed
2/20/2011	3:14:50 PM	Main Vac valve closed
2/20/2011	3:14:50 PM	Bypass valve closed
2/20/2011	3:14:50 PM	Bubbler valve closed
2/20/2011	3:14:50 PM	H2 valve opened
2/20/2011	3:14:50 PM	Helium MFC set to  0.000000
2/20/2011	3:14:50 PM	H2 MFC set to  500.000000
2/20/2011	3:14:50 PM	BCl3 MFC set to  0.000000
2/20/2011	3:14:50 PM	PHl3 MFC set to  0.000000
2/20/2011	3:14:50 PM	SiCl4 MFC set to  0.000000
2/20/2011	3:14:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	3:14:50 PM	Tube furnace set to 0
2/20/2011	3:16:14 PM	Helium valve closed
2/20/2011	3:16:14 PM	BCl3 valve closed
2/20/2011	3:16:14 PM	PH3 valve closed
2/20/2011	3:16:14 PM	SiCl4 pre valve closed
2/20/2011	3:16:14 PM	SiCl4 post valve closed
2/20/2011	3:16:14 PM	Main Vac valve closed
2/20/2011	3:16:14 PM	Bypass valve closed
2/20/2011	3:16:14 PM	H2 valve opened
2/20/2011	3:16:14 PM	Bubbler valve opened
2/20/2011	3:16:14 PM	Helium MFC set to  0.000000
2/20/2011	3:16:14 PM	H2 MFC set to  500.000000
2/20/2011	3:16:14 PM	BCl3 MFC set to  0.000000
2/20/2011	3:16:14 PM	PHl3 MFC set to  0.000000
2/20/2011	3:16:14 PM	SiCl4 MFC set to  0.000000
2/20/2011	3:16:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	3:16:15 PM	Tube furnace set to 1000
2/20/2011	3:16:15 PM	Helium valve closed
2/20/2011	3:16:15 PM	H2 valve closed
2/20/2011	3:16:15 PM	BCl3 valve closed
2/20/2011	3:16:15 PM	PH3 valve closed
2/20/2011	3:16:15 PM	SiCl4 pre valve closed
2/20/2011	3:16:15 PM	SiCl4 post valve closed
2/20/2011	3:16:15 PM	Main Vac valve closed
2/20/2011	3:16:15 PM	Bubbler valve closed
2/20/2011	3:16:15 PM	Bypass valve closed
2/20/2011	3:16:15 PM	Helium MFC set to  0.000000
2/20/2011	3:16:15 PM	H2 MFC set to  0.000000
2/20/2011	3:16:15 PM	BCl3 MFC set to  0.000000
2/20/2011	3:16:15 PM	PHl3 MFC set to  0.000000
2/20/2011	3:16:15 PM	SiCl4 MFC set to  0.000000
2/20/2011	3:16:15 PM	Bypass solenoid MFC set to  760.000000
2/20/2011	3:16:15 PM	Tube furnace set to 0
2/20/2011	3:16:15 PM	Baratron reads 748.464117 Torr and NaOH valve is open.  Emergency exit.
2/20/2011	3:16:52 PM	Run aborted at 3:16 PM
2/20/2011	3:17:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/20/2011	3:17:28 PM	Recipe started at 3:17 PM
2/20/2011	3:17:28 PM	Helium valve closed
2/20/2011	3:17:28 PM	H2 valve closed
2/20/2011	3:17:28 PM	BCl3 valve closed
2/20/2011	3:17:28 PM	PH3 valve closed
2/20/2011	3:17:28 PM	SiCl4 pre valve closed
2/20/2011	3:17:28 PM	SiCl4 post valve closed
2/20/2011	3:17:28 PM	Main Vac valve closed
2/20/2011	3:17:28 PM	Bypass valve closed
2/20/2011	3:17:28 PM	Bubbler valve closed
2/20/2011	3:17:28 PM	Helium MFC set to  0.000000
2/20/2011	3:17:28 PM	H2 MFC set to  0.000000
2/20/2011	3:17:28 PM	BCl3 MFC set to  0.000000
2/20/2011	3:17:28 PM	PHl3 MFC set to  0.000000
2/20/2011	3:17:28 PM	SiCl4 MFC set to  0.000000
2/20/2011	3:17:28 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	3:17:28 PM	Tube furnace set to 0
2/20/2011	3:17:28 PM	Run finished at 3:17 PM
2/20/2011	3:17:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/20/2011	3:17:35 PM	Helium MFC set to  500.000000
2/20/2011	3:17:37 PM	Helium valve opened
2/20/2011	3:17:40 PM	Bubbler valve opened
2/20/2011	3:17:49 PM	Bubbler valve closed
2/20/2011	3:17:50 PM	Helium valve closed
2/20/2011	3:18:05 PM	Recipe started at 3:18 PM
2/20/2011	3:18:05 PM	Helium valve closed
2/20/2011	3:18:05 PM	BCl3 valve closed
2/20/2011	3:18:05 PM	PH3 valve closed
2/20/2011	3:18:05 PM	SiCl4 pre valve closed
2/20/2011	3:18:05 PM	SiCl4 post valve closed
2/20/2011	3:18:05 PM	Main Vac valve closed
2/20/2011	3:18:05 PM	Bypass valve closed
2/20/2011	3:18:05 PM	Bubbler valve closed
2/20/2011	3:18:05 PM	H2 valve opened
2/20/2011	3:18:05 PM	Helium MFC set to  0.000000
2/20/2011	3:18:05 PM	H2 MFC set to  500.000000
2/20/2011	3:18:05 PM	BCl3 MFC set to  0.000000
2/20/2011	3:18:05 PM	PHl3 MFC set to  0.000000
2/20/2011	3:18:05 PM	SiCl4 MFC set to  0.000000
2/20/2011	3:18:05 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	3:18:06 PM	Tube furnace set to 0
2/20/2011	3:18:09 PM	Helium valve closed
2/20/2011	3:18:09 PM	BCl3 valve closed
2/20/2011	3:18:09 PM	PH3 valve closed
2/20/2011	3:18:09 PM	SiCl4 pre valve closed
2/20/2011	3:18:09 PM	SiCl4 post valve closed
2/20/2011	3:18:09 PM	Main Vac valve closed
2/20/2011	3:18:09 PM	Bypass valve closed
2/20/2011	3:18:09 PM	H2 valve opened
2/20/2011	3:18:09 PM	Bubbler valve opened
2/20/2011	3:18:09 PM	Helium MFC set to  0.000000
2/20/2011	3:18:09 PM	H2 MFC set to  500.000000
2/20/2011	3:18:09 PM	BCl3 MFC set to  0.000000
2/20/2011	3:18:09 PM	PHl3 MFC set to  0.000000
2/20/2011	3:18:09 PM	SiCl4 MFC set to  0.000000
2/20/2011	3:18:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	3:18:09 PM	Tube furnace set to 1000
2/20/2011	3:38:09 PM	Helium valve closed
2/20/2011	3:38:09 PM	BCl3 valve closed
2/20/2011	3:38:09 PM	PH3 valve closed
2/20/2011	3:38:09 PM	Main Vac valve closed
2/20/2011	3:38:09 PM	Bypass valve closed
2/20/2011	3:38:09 PM	H2 valve opened
2/20/2011	3:38:09 PM	SiCl4 pre valve opened
2/20/2011	3:38:09 PM	SiCl4 post valve opened
2/20/2011	3:38:09 PM	Bubbler valve opened
2/20/2011	3:38:09 PM	Helium MFC set to  0.000000
2/20/2011	3:38:09 PM	H2 MFC set to  500.000000
2/20/2011	3:38:09 PM	BCl3 MFC set to  0.000000
2/20/2011	3:38:09 PM	PHl3 MFC set to  0.000000
2/20/2011	3:38:09 PM	SiCl4 MFC set to  50.000000
2/20/2011	3:38:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	3:38:09 PM	Tube furnace set to 1000
2/20/2011	4:14:35 PM	Run aborted at 4:14 PM
2/20/2011	4:14:35 PM	Helium valve closed
2/20/2011	4:14:35 PM	H2 valve closed
2/20/2011	4:14:35 PM	BCl3 valve closed
2/20/2011	4:14:35 PM	PH3 valve closed
2/20/2011	4:14:35 PM	SiCl4 pre valve closed
2/20/2011	4:14:35 PM	SiCl4 post valve closed
2/20/2011	4:14:35 PM	Bypass valve closed
2/20/2011	4:14:35 PM	Main Vac valve closed
2/20/2011	4:14:35 PM	Bubbler valve closed
2/20/2011	4:14:35 PM	Helium MFC set to  0.000000
2/20/2011	4:14:35 PM	H2 MFC set to  0.000000
2/20/2011	4:14:35 PM	BCl3 MFC set to  0.000000
2/20/2011	4:14:35 PM	PHl3 MFC set to  0.000000
2/20/2011	4:14:35 PM	SiCl4 MFC set to  0.000000
2/20/2011	4:14:35 PM	Tube furnace set to 0
2/20/2011	4:14:39 PM	Helium MFC set to  500.000000
2/20/2011	4:14:41 PM	Helium valve opened
2/20/2011	4:14:43 PM	Bubbler valve opened
2/20/2011	4:15:22 PM	SiCl4 post valve opened
2/20/2011	4:18:16 PM	Tube furnace set to 1000
2/20/2011	4:26:15 PM	SiCl4 MFC set to  50.000000
2/20/2011	4:26:24 PM	SiCl4 pre valve opened
2/20/2011	4:27:37 PM	SiCl4 post valve closed
2/20/2011	4:27:38 PM	SiCl4 pre valve closed
2/20/2011	4:27:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/20/2011	4:27:42 PM	Recipe started at 4:27 PM
2/20/2011	4:27:42 PM	Helium valve closed
2/20/2011	4:27:42 PM	H2 valve closed
2/20/2011	4:27:42 PM	BCl3 valve closed
2/20/2011	4:27:42 PM	PH3 valve closed
2/20/2011	4:27:42 PM	SiCl4 pre valve closed
2/20/2011	4:27:42 PM	SiCl4 post valve closed
2/20/2011	4:27:42 PM	Main Vac valve closed
2/20/2011	4:27:42 PM	Bypass valve closed
2/20/2011	4:27:42 PM	Bubbler valve closed
2/20/2011	4:27:42 PM	Helium MFC set to  0.000000
2/20/2011	4:27:42 PM	H2 MFC set to  0.000000
2/20/2011	4:27:42 PM	BCl3 MFC set to  0.000000
2/20/2011	4:27:42 PM	PHl3 MFC set to  0.000000
2/20/2011	4:27:42 PM	SiCl4 MFC set to  0.000000
2/20/2011	4:27:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	4:27:43 PM	Tube furnace set to 0
2/20/2011	4:27:43 PM	Run finished at 4:27 PM
2/20/2011	4:27:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/20/2011	4:28:15 PM	Recipe started at 4:28 PM
2/20/2011	4:28:16 PM	Helium valve closed
2/20/2011	4:28:16 PM	BCl3 valve closed
2/20/2011	4:28:16 PM	PH3 valve closed
2/20/2011	4:28:16 PM	SiCl4 pre valve closed
2/20/2011	4:28:16 PM	SiCl4 post valve closed
2/20/2011	4:28:16 PM	Main Vac valve closed
2/20/2011	4:28:16 PM	Bypass valve closed
2/20/2011	4:28:16 PM	Bubbler valve closed
2/20/2011	4:28:16 PM	H2 valve opened
2/20/2011	4:28:16 PM	Helium MFC set to  0.000000
2/20/2011	4:28:16 PM	H2 MFC set to  500.000000
2/20/2011	4:28:16 PM	BCl3 MFC set to  0.000000
2/20/2011	4:28:16 PM	PHl3 MFC set to  0.000000
2/20/2011	4:28:16 PM	SiCl4 MFC set to  0.000000
2/20/2011	4:28:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	4:28:16 PM	Tube furnace set to 0
2/20/2011	4:28:17 PM	Helium valve closed
2/20/2011	4:28:17 PM	BCl3 valve closed
2/20/2011	4:28:17 PM	PH3 valve closed
2/20/2011	4:28:17 PM	SiCl4 pre valve closed
2/20/2011	4:28:17 PM	SiCl4 post valve closed
2/20/2011	4:28:17 PM	Main Vac valve closed
2/20/2011	4:28:17 PM	Bypass valve closed
2/20/2011	4:28:17 PM	H2 valve opened
2/20/2011	4:28:17 PM	Bubbler valve opened
2/20/2011	4:28:17 PM	Helium MFC set to  0.000000
2/20/2011	4:28:17 PM	H2 MFC set to  500.000000
2/20/2011	4:28:17 PM	BCl3 MFC set to  0.000000
2/20/2011	4:28:17 PM	PHl3 MFC set to  0.000000
2/20/2011	4:28:17 PM	SiCl4 MFC set to  0.000000
2/20/2011	4:28:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	4:28:18 PM	Tube furnace set to 1000
2/20/2011	4:28:19 PM	Helium valve closed
2/20/2011	4:28:19 PM	BCl3 valve closed
2/20/2011	4:28:19 PM	PH3 valve closed
2/20/2011	4:28:19 PM	Main Vac valve closed
2/20/2011	4:28:19 PM	Bypass valve closed
2/20/2011	4:28:19 PM	H2 valve opened
2/20/2011	4:28:19 PM	SiCl4 pre valve opened
2/20/2011	4:28:19 PM	SiCl4 post valve opened
2/20/2011	4:28:19 PM	Bubbler valve opened
2/20/2011	4:28:19 PM	Helium MFC set to  0.000000
2/20/2011	4:28:19 PM	H2 MFC set to  500.000000
2/20/2011	4:28:19 PM	BCl3 MFC set to  0.000000
2/20/2011	4:28:19 PM	PHl3 MFC set to  0.000000
2/20/2011	4:28:19 PM	SiCl4 MFC set to  50.000000
2/20/2011	4:28:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	4:28:19 PM	Tube furnace set to 1000
2/20/2011	7:28:19 PM	H2 valve closed
2/20/2011	7:28:19 PM	BCl3 valve closed
2/20/2011	7:28:19 PM	PH3 valve closed
2/20/2011	7:28:19 PM	SiCl4 pre valve closed
2/20/2011	7:28:19 PM	SiCl4 post valve closed
2/20/2011	7:28:19 PM	Main Vac valve closed
2/20/2011	7:28:19 PM	Bypass valve closed
2/20/2011	7:28:19 PM	Helium valve opened
2/20/2011	7:28:19 PM	Bubbler valve opened
2/20/2011	7:28:19 PM	Helium MFC set to  500.000000
2/20/2011	7:28:19 PM	H2 MFC set to  0.000000
2/20/2011	7:28:19 PM	BCl3 MFC set to  0.000000
2/20/2011	7:28:19 PM	PHl3 MFC set to  0.000000
2/20/2011	7:28:19 PM	SiCl4 MFC set to  0.000000
2/20/2011	7:28:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	7:28:19 PM	Tube furnace set to 0
2/20/2011	7:48:19 PM	Helium valve closed
2/20/2011	7:48:19 PM	H2 valve closed
2/20/2011	7:48:19 PM	BCl3 valve closed
2/20/2011	7:48:19 PM	PH3 valve closed
2/20/2011	7:48:19 PM	SiCl4 pre valve closed
2/20/2011	7:48:19 PM	SiCl4 post valve closed
2/20/2011	7:48:19 PM	Main Vac valve closed
2/20/2011	7:48:19 PM	Bypass valve closed
2/20/2011	7:48:19 PM	Bubbler valve closed
2/20/2011	7:48:19 PM	Helium MFC set to  0.000000
2/20/2011	7:48:19 PM	H2 MFC set to  0.000000
2/20/2011	7:48:19 PM	BCl3 MFC set to  0.000000
2/20/2011	7:48:19 PM	PHl3 MFC set to  0.000000
2/20/2011	7:48:19 PM	SiCl4 MFC set to  0.000000
2/20/2011	7:48:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	7:48:19 PM	Tube furnace set to 0
2/20/2011	7:48:20 PM	Run finished at 7:48 PM
2/20/2011	10:07:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	10:07:39 PM	Recipe started at 10:07 PM
2/20/2011	10:07:39 PM	Helium valve closed
2/20/2011	10:07:39 PM	H2 valve closed
2/20/2011	10:07:39 PM	BCl3 valve closed
2/20/2011	10:07:39 PM	PH3 valve closed
2/20/2011	10:07:39 PM	SiCl4 pre valve closed
2/20/2011	10:07:39 PM	SiCl4 post valve closed
2/20/2011	10:07:39 PM	Main Vac valve closed
2/20/2011	10:07:39 PM	Bubbler valve closed
2/20/2011	10:07:39 PM	Bypass valve opened
2/20/2011	10:07:39 PM	Helium MFC set to  0.000000
2/20/2011	10:07:39 PM	H2 MFC set to  0.000000
2/20/2011	10:07:39 PM	BCl3 MFC set to  0.000000
2/20/2011	10:07:39 PM	PHl3 MFC set to  0.000000
2/20/2011	10:07:39 PM	SiCl4 MFC set to  0.000000
2/20/2011	10:07:39 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	10:07:39 PM	Tube furnace set to 0
2/20/2011	10:08:03 PM	Helium valve closed
2/20/2011	10:08:03 PM	H2 valve closed
2/20/2011	10:08:03 PM	BCl3 valve closed
2/20/2011	10:08:03 PM	PH3 valve closed
2/20/2011	10:08:03 PM	SiCl4 pre valve closed
2/20/2011	10:08:03 PM	SiCl4 post valve closed
2/20/2011	10:08:03 PM	Bubbler valve closed
2/20/2011	10:08:03 PM	Main Vac valve opened
2/20/2011	10:08:03 PM	Bypass valve opened
2/20/2011	10:08:03 PM	Helium MFC set to  0.000000
2/20/2011	10:08:03 PM	H2 MFC set to  0.000000
2/20/2011	10:08:03 PM	BCl3 MFC set to  0.000000
2/20/2011	10:08:03 PM	PHl3 MFC set to  0.000000
2/20/2011	10:08:03 PM	SiCl4 MFC set to  0.000000
2/20/2011	10:08:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	10:08:03 PM	Tube furnace set to 0
2/20/2011	10:08:03 PM	Run finished at 10:08 PM
2/20/2011	10:08:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	10:08:31 PM	Program exited cleanly
2/20/2011	10:10:35 PM	Program started normally
2/20/2011	10:10:35 PM	Helium valve closed
2/20/2011	10:10:35 PM	H2 valve closed
2/20/2011	10:10:35 PM	BCl3 valve closed
2/20/2011	10:10:35 PM	PH3 valve closed
2/20/2011	10:10:35 PM	SiCl4 pre valve closed
2/20/2011	10:10:35 PM	SiCl4 post valve closed
2/20/2011	10:10:35 PM	Main Vac valve closed
2/20/2011	10:10:35 PM	Bypass valve closed
2/20/2011	10:10:35 PM	Bubbler valve closed
2/20/2011	10:10:35 PM	Helium MFC set to  0.000000
2/20/2011	10:10:35 PM	H2 MFC set to  0.000000
2/20/2011	10:10:35 PM	BCl3 MFC set to  0.000000
2/20/2011	10:10:35 PM	PHl3 MFC set to  0.000000
2/20/2011	10:10:35 PM	SiCl4 MFC set to  0.000000
2/20/2011	10:10:35 PM	Bypass solenoid MFC set to  760.000000
2/20/2011	10:10:35 PM	Tube furnace set to 0
2/20/2011	10:10:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2011	10:10:41 PM	Recipe started at 10:10 PM
2/20/2011	10:10:41 PM	Helium valve closed
2/20/2011	10:10:41 PM	H2 valve closed
2/20/2011	10:10:41 PM	BCl3 valve closed
2/20/2011	10:10:41 PM	PH3 valve closed
2/20/2011	10:10:41 PM	SiCl4 pre valve closed
2/20/2011	10:10:41 PM	SiCl4 post valve closed
2/20/2011	10:10:41 PM	Main Vac valve closed
2/20/2011	10:10:41 PM	Bubbler valve closed
2/20/2011	10:10:41 PM	Bypass valve opened
2/20/2011	10:10:41 PM	Helium MFC set to  0.000000
2/20/2011	10:10:41 PM	H2 MFC set to  0.000000
2/20/2011	10:10:41 PM	BCl3 MFC set to  0.000000
2/20/2011	10:10:41 PM	PHl3 MFC set to  0.000000
2/20/2011	10:10:41 PM	SiCl4 MFC set to  0.000000
2/20/2011	10:10:41 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	10:10:41 PM	Tube furnace set to 0
2/20/2011	10:10:41 PM	Helium valve closed
2/20/2011	10:10:41 PM	H2 valve closed
2/20/2011	10:10:41 PM	BCl3 valve closed
2/20/2011	10:10:41 PM	PH3 valve closed
2/20/2011	10:10:41 PM	SiCl4 pre valve closed
2/20/2011	10:10:41 PM	SiCl4 post valve closed
2/20/2011	10:10:41 PM	Bubbler valve closed
2/20/2011	10:10:41 PM	Main Vac valve opened
2/20/2011	10:10:41 PM	Bypass valve opened
2/20/2011	10:10:41 PM	Helium MFC set to  0.000000
2/20/2011	10:10:41 PM	H2 MFC set to  0.000000
2/20/2011	10:10:41 PM	BCl3 MFC set to  0.000000
2/20/2011	10:10:41 PM	PHl3 MFC set to  0.000000
2/20/2011	10:10:41 PM	SiCl4 MFC set to  0.000000
2/20/2011	10:10:41 PM	Bypass solenoid MFC set to  0.000000
2/20/2011	10:10:41 PM	Tube furnace set to 0
2/20/2011	10:10:42 PM	Run finished at 10:10 PM
2/20/2011	10:10:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
